泵類型 |
型號 |
最高真空度
(-kPa) |
輸入壓力
(MPa) |
不同真空度 (-kPa) 的抽氣流量 [NI/s] |
0 |
10 |
20 |
30 |
40 |
50 |
60 |
70 |
80 |
90 |
95 |
L |
Classic L25 |
75 |
0.6 |
6.3 |
3.3 |
2.3 |
1.55 |
0.83 |
0.63 |
0.45 |
0.28 |
- |
- |
- |
Classic L50 |
75 |
0.6 |
10.3 |
6.2 |
4.4 |
2.9 |
1.66 |
1.25 |
0.9 |
0.56 |
- |
- |
- |
Classic L100 |
75 |
0.6 |
15 |
10.4 |
7.8 |
5.3 |
3.25 |
2.5 |
1.8 |
1.12 |
- |
- |
- |
M |
Chip, MiniSystem M5 |
84 |
0.6 |
0.6 |
0.4 |
0.25 |
0.22 |
0.17 |
0.13 |
0.09 |
0.04 |
0.011 |
- |
- |
Chip, MiniSystem M10 |
84 |
0.6 |
1.2 |
0.8 |
0.5 |
0.44 |
0.33 |
0.26 |
0.18 |
0.08 |
0.022 |
- |
- |
Chip, MiniSystem MiniFlex M20 |
84 |
0.6 |
2.4 |
1.6 |
1 |
0.88 |
0.65 |
0.52 |
0.35 |
0.17 |
0.045 |
- |
- |
Chip, M25 |
91 |
0.6 |
6.4 |
3.6 |
2.4 |
1.2 |
0.6 |
0.44 |
0.3 |
0.16 |
0.075 |
0.012 |
- |
Chip, M25L |
91 |
0.34 |
6 |
2.75 |
2 |
1.22 |
0.68 |
0.53 |
0.4 |
0.27 |
0.11 |
0.012 |
- |
MiniFlex M40 |
84 |
0.6 |
4.8 |
3.1 |
1.8 |
1.5 |
1.3 |
1.03 |
0.7 |
0.35 |
0.09 |
- |
- |
Classic M50 |
91 |
0.6 |
10.7 |
6.5 |
4.6 |
2.4 |
1.2 |
0.89 |
0.6 |
0.33 |
0.15 |
0.025 |
- |
Classic M50L |
91 |
0.34 |
10.3 |
5.4 |
3.9 |
2.45 |
1.36 |
1.06 |
0.8 |
0.54 |
0.22 |
0.025 |
- |
MiniFlex M60 |
84 |
0.6 |
6.4 |
4.2 |
2.6 |
2.25 |
1.95 |
1.55 |
1.05 |
0.52 |
0.14 |
- |
- |
Classic M100 |
91 |
0.6 |
15.5 |
10.6 |
7.5 |
4.8 |
2.4 |
1.8 |
1.2 |
0.65 |
0.3 |
0.051 |
- |
MiniFlex M150 |
91 |
0.6 |
25 |
21 |
14 |
7 |
3.6 |
2.7 |
1.8 |
1.0 |
0.45 |
0.075 |
- |
Round, MiniFlex M2000 |
91 |
0.6 |
40 |
28 |
18.5 |
9.6 |
4.8 |
3.6 |
2.4 |
1.3 |
0.6 |
0.1 |
- |
Maxi Mll 200 |
91 |
0.6 |
40 |
28 |
18.5 |
9.6 |
4.8 |
3.6 |
2.4 |
1.3 |
0.6 |
0.1 |
- |
Maxi Mll 400 |
91 |
0.6 |
80 |
56 |
37 |
19.2 |
9.6 |
7.2 |
4.8 |
2.6 |
1.2 |
0.2 |
- |
Maxi Mll 800 |
91 |
0.6 |
160 |
11 |
274 |
38.4 |
19.2 |
14.4 |
9.6 |
5.2 |
2.4 |
0.4 |
- |
Maxi Mll 1200 |
91 |
0.6 |
240 |
168 |
111 |
57.6 |
28.8 |
21.6 |
14.4 |
7.8 |
3.6 |
0.6 |
- |
X |
Chip, Minisystem X5 |
95 |
0.5 |
0.52 |
0.3 |
0.15 |
0.13 |
0.11 |
0.09 |
0.07 |
0.05 |
0.02 |
0.0075 |
- |
Chip, Minisystem X5L |
94 |
0.4 |
0.5 |
0.31 |
0.15 |
0.12 |
0.1 |
0.08 |
0.06 |
0.04 |
0.017 |
0.006 |
- |
Chip, Minisystem X10 |
95 |
0.5 |
1.03 |
0.6 |
0.3 |
0.26 |
0.23 |
0.18 |
0.14 |
0.09 |
0.04 |
0.015 |
- |
Chip, Minisystem X10L |
94 |
0.4 |
1 |
0.62 |
0.29 |
0.23 |
0.2 |
0.16 |
0.12 |
0.08 |
0.035 |
0.012 |
- |
Chip, Minisystem, MiniFlex X20 |
95 |
0.5 |
2.05 |
1.2 |
0.58 |
0.52 |
0.45 |
0.36 |
0.29 |
0.19 |
0.08 |
0.03 |
- |
Chip, Minisystem, MiniFlex X20L |
94 |
0.4 |
2 |
1.25 |
0.58 |
0.45 |
0.4 |
0.32 |
0.25 |
0.16 |
0.07 |
0.025 |
- |
MiniFlex X40 |
95 |
0.5 |
4.1 |
2.4 |
1.15 |
1.05 |
0.9 |
0.72 |
0.57 |
0.38 |
0.16 |
0.06 |
- |
MiniFlex X40L |
94 |
0.4 |
4 |
2.5 |
1.15 |
0.9 |
0.8 |
0.64 |
0.5 |
0.32 |
0.14 |
0.05 |
- |
Classic X40 |
97 |
0.6 |
3 |
2.4 |
1.7 |
1.1 |
0.58 |
0.45 |
0.35 |
0.25 |
0.19 |
0.07 |
0.025 |
Sting X40 |
96 |
0.5 |
1 |
0.89 |
0.79 |
0.69 |
0.58 |
0.48 |
0.38 |
0.28 |
0.18 |
0.06 |
- |
MiniFlex X60 |
95 |
0.5 |
5.5 |
3.3 |
1.7 |
1.55 |
1.3 |
1.08 |
0.85 |
0.56 |
0.24 |
0.09 |
- |
MiniFlex X60L |
94 |
0.4 |
5.5 |
3.5 |
1.7 |
1.35 |
1.2 |
0.96 |
0.75 |
0.5 |
0.38 |
0.14 |
0.05 |
Classic X80 |
97 |
0.6 |
6 |
4.8 |
3.4 |
2.2 |
1.15 |
0.9 |
0.7 |
0.5 |
0.38 |
0.14 |
0.05 |
Classic X120 |
97 |
0.6 |
8.6 |
7 |
5.1 |
3.3 |
1.7 |
1.35 |
1.05 |
0.75 |
0.57 |
0.21 |
0.075 |
MiniFlex X160 |
97 |
0.6 |
11.5 |
9.4 |
6.8 |
4.3 |
2.3 |
1.8 |
1.4 |
1 |
0.75 |
0.28 |
0.1 |
MiniFlex X240 |
97 |
0.6 |
17.2 |
14 |
10.2 |
6.6 |
3.5 |
2.7 |
2.1 |
1.5 |
1.14 |
0.42 |
0.15 |
MiniFlex X320 |
97 |
0.6 |
22.5 |
18.2 |
13.5 |
8.8 |
4.8 |
3.6 |
2.8 |
2 |
1.52 |
0.55 |
0.2 |
H |
Classic H40 |
15 mbar abs |
0.6 |
3 |
2.4 |
1.75 |
1.1 |
0.53 |
0.35 |
0.24 |
0.16 |
0.12 |
0.06 |
0.02 |
Classic H120 |
5 mbar abs |
0.6 |
8.6 |
7 |
5.1 |
3.3 |
1.75 |
1.3 |
0.9 |
0.65 |
0.45 |
0.13 |
0.06 |
MiniFlex H240 |
5 mbar abs |
0.6 |
17.2 |
14 |
10.2 |
6.6 |
3.5 |
2.6 |
1.8 |
1.3 |
0.9 |
0.26 |
0.12 |
泵類型 |
型號 |
最高真空度
(-kPa) |
輸入壓力
(MPa) |
不同真空度 (-kPa) 的抽氣流量 [NI/s] |
20 |
40 |
50 |
60 |
70 |
80 |
90 |
95 |
99 |
100.3 |
L |
Classic L25 |
0.6 |
1.75 |
0.048 |
0.185 |
0.34 |
0.54 |
0.86 |
- |
- |
- |
- |
- |
Classic L50 |
0.6 |
3.5 |
0.029 |
0.1 |
0.175 |
0.27 |
0.43 |
- |
- |
- |
- |
- |
Classic L100 |
0.6 |
7 |
0.016 |
0.055 |
0.09 |
0.135 |
0.215 |
- |
- |
- |
- |
- |
M |
Chip, MiniSystem M5 |
0.6 |
0.35 |
0.56 |
1.58 |
2.36 |
3.456 |
5.28 |
10.32 |
- |
- |
- |
- |
Chip, MiniSystem M10 |
0.6 |
0.7 |
0.28 |
0.79 |
1.18 |
1.728 |
2.64 |
5.16 |
- |
- |
- |
- |
Chip, MiniSystem MiniFlex M20 |
0.6 |
1.4 |
0.14 |
0.395 |
0.59 |
0.864 |
1.32 |
2.58 |
- |
- |
- |
- |
Chip, M25 |
0.6 |
1.8 |
0.044 |
0.235 |
0.44 |
0.73 |
1.23 |
2.2 |
5.36 |
- |
- |
- |
Chip, M25L |
0.34 |
1.9 |
0.056 |
0.24 |
0.42 |
0.66 |
1.02 |
1.64 |
4.6 |
- |
- |
- |
MiniFlex M40 |
0.6 |
2.8 |
0.07 |
0.198 |
0.295 |
0.432 |
0.660 |
1.29 |
- |
- |
- |
- |
Classic M50 |
0.6 |
3.5 |
0.026 |
0.117 |
0.22 |
0.365 |
0.615 |
1.1 |
2.68 |
- |
- |
- |
Classic M50L |
0.34 |
3.8 |
0.032 |
0.12 |
0.212 |
0.33 |
0.51 |
0.82 |
2.3 |
- |
- |
- |
MiniFlex M60 |
0.6 |
4.2 |
0.048 |
0.132 |
0.197 |
0.288 |
0.44 |
0.86 |
- |
- |
- |
- |
Classic M100 |
0.6 |
7 |
0.016 |
0.059 |
0.11 |
0.183 |
0.308 |
0.55 |
1.34 |
- |
- |
- |
MiniFlex M150 |
0.6 |
10.5 |
0.011 |
0.04 |
0.074 |
0.121 |
0.205 |
0.365 |
0.865 |
- |
- |
- |
Round, MiniFlex M2000 |
0.6 |
14 |
0.0056 |
0.03 |
0.055 |
0.091 |
0.154 |
0.275 |
0.67 |
- |
- |
- |
Maxi Mll 200 |
0.6 |
14 |
0.0056 |
0.03 |
0.055 |
0.091 |
0.154 |
0.275 |
0.67 |
- |
- |
- |
Maxi Mll 400 |
0.6 |
28 |
0.0028 |
0.015 |
0.028 |
0.045 |
0.077 |
0.137 |
0.335 |
- |
- |
- |
Maxi Mll 800 |
0.6 |
56 |
0.0014 |
0.0075 |
0.014 |
0.023 |
0.038 |
0.069 |
0.168 |
- |
- |
- |
Maxi Mll 1200 |
0.6 |
84 |
0.009 |
0.005 |
0.009 |
0.015 |
0.025 |
0.046 |
0.125 |
- |
- |
- |
X |
Chip, Minisystem X5 |
0.5 |
0.36 |
0.8 |
2.4 |
3.6 |
4.92 |
6.9 |
10.2 |
19.2 |
- |
- |
- |
Chip, Minisystem X5L |
0.4 |
0.4 |
0.72 |
2.56 |
3.76 |
5.28 |
7.32 |
13.82 |
20.4 |
- |
- |
- |
Chip, Minisystem X10 |
0.5 |
0.72 |
0.4 |
1.2 |
1.8 |
2.46 |
3.45 |
5.1 |
9.6 |
- |
- |
- |
Chip, Minisystem X10L |
0.4 |
0.8 |
0.36 |
1.28 |
1.88 |
2.64 |
3.66 |
5.8 |
10.2 |
- |
- |
- |
Chip, Minisystem, MiniFlex X20 |
0.5 |
1.44 |
0.2 |
0.6 |
0.9 |
1.23 |
1.725 |
2.55 |
4.8 |
- |
- |
- |
Chip, Minisystem, MiniFlex X20L |
0.4 |
1.6 |
0.18 |
0.64 |
0.94 |
1.32 |
1.83 |
2.9 |
5.1 |
- |
- |
- |
MiniFlex X40 |
0.5 |
2.88 |
0.1 |
0.3 |
0.45 |
0.615 |
0.86 |
1.275 |
2.4 |
- |
- |
- |
MiniFlex X40L |
0.4 |
3.2 |
0.09 |
0.32 |
0.47 |
0.66 |
0.93 |
1.45 |
2.55 |
- |
- |
- |
Classic X40 |
0.6 |
2.5 |
0.07 |
0.26 |
0.5 |
0.74 |
1.13 |
1.6 |
27 |
3.8 |
- |
- |
Sting X40 |
0.5 |
2.1 |
0.16 |
0.43 |
0.62 |
0.85 |
1.15 |
1.58 |
2.6 |
4.9 |
- |
- |
MiniFlex X60 |
0.5 |
4.32 |
0.069 |
0.2 |
0.3 |
0.41 |
0.575 |
0.85 |
1.6 |
- |
- |
- |
MiniFlex X60L |
0.4 |
4.8 |
0.06 |
0.213 |
0.315 |
0.44 |
0.62 |
0.965 |
1.7 |
- |
- |
- |
Classic X80 |
0.6 |
5 |
0.035 |
0.13 |
0.25 |
0.37 |
0.565 |
0.8 |
1.35 |
1.9 |
- |
- |
Classic X120 |
0.6 |
7.5 |
0.025 |
0.097 |
0.167 |
0.247 |
0.377 |
0.533 |
0.9 |
1.267 |
- |
- |
MiniFlex X160 |
0.6 |
10 |
0.018 |
0.065 |
0.125 |
0.185 |
0.283 |
0.4 |
0.675 |
0.95 |
- |
- |
MiniFlex X240 |
0.6 |
15 |
0.013 |
0.048 |
0.083 |
0.124 |
0.188 |
0.267 |
0.45 |
0.633 |
- |
- |
MiniFlex X320 |
0.6 |
20 |
0.01 |
0.033 |
0.062 |
0.093 |
0.142 |
0.2 |
0.338 |
0.475 |
- |
- |
H |
Classic H40 |
0.6 |
2.6 |
0.07 |
0.25 |
0.55 |
0.92 |
1.45 |
2.2 |
3.4 |
5 |
9.2 |
- |
Classic H120 |
0.6 |
7.6 |
0.025 |
0.097 |
0.17 |
0.272 |
0.42 |
0.6 |
1.18 |
1.82 |
3.6 |
6.4 |
|