兩段式高真空幫浦
魯式真空幫浦
擴散幫浦
渦輪幫浦
分子幫浦
真空測漏儀

 

Other:

ATR "C" version: protected for corrosive gas pumping
The inverted dynamic seal: an additional protection

This new anti-corrosive protection is a built-in mechanical system based on the molecular drag pump principle.

The inverted dynamic seal provides a high compression ratio between the bearings and the pump exhaust and minimises the amount of corrosive gases reaching the bearings.

Protected against the corrosion effects:

The ATP pumps of the "C" version are well adapted to  corrosive gas pumping. The gas purge added to the inverted dynamic seal result in an enhanced protection against corrosion.

Characteristics

 ATP 80C ATP 100C ATP 150C ATP 400C ATP 900C
Inlet flange

DN63 ISO-K

DN63 CF-F

DN100 ISO-K

DN100 CF-F

DN100 ISO-K

DN100 CF-F

DN160 ISO-K

DN160 CF-F

DN200 ISO-K

DN200 CF-F
　 N2 l/s 80 100 140 400 900
Pumping speed He l/s 50 60 100 300 540
　 H2 l/s 40 40 80 250 300
N2 8 × 107 8 × 107 7 × 108 7 × 108 1 × 109
Compression ratio He 2500 2500 1.2 × 104 1.5 × 104 2 × 104
H2 300 300 1 × 103 1 × 103 2 × 103
Ultimate pressure without pruge(1)(2) mbar 5 × 10-9 5 × 10-9 5 × 10-10 5 × 10-10 5 × 10-10
Ultimate pressure without pruge(2) mbar 5 × 10-8 5 × 10-8 1 × 10-7 1 × 10-7 1 × 10-7
Purging nitrogen flow rate sccm 　 　 50 　 　
Maximum continuous inlet presure(2) mbar 1 × 10-1 1 × 10-1 5 × 10-1 2 × 10-2 1 × 10-2
Maximum exhaust pressure (2)

mbar

 2 × 10-1 3 × 10-1 4 × 10-1 2 × 10-1 3 × 10-1
Minimum recommeded for pump 　 Pascal 2005 CP Pascal 2005 CP Pascal 2021 CP Pascal 2033 CP Pascal 2063 CP
Mounting orientation 　 　 　 Any 　 　
Rotational speed

rpm

 　 　 27 000 　 　
Start-up time

min

 1min 45s 1 min 45s 2 min 3 min 3 min
Maximum ambient temperature  ℃ 40 40 40 40 50 (pump)
Maximum bake out temperature on flange ℃ 120 120 120 100 100
Exhaust flange ISO-KF DN 25 DN 25 DN 25 DN 40 DN 40
N2 purge flange ISO-KF 　 　 DN 16 　 　
Weight air cooled kg(lb) ISO-K 4 (8.8)
5.3 (11.7)		 4 (8.8)
5.3 (11.7)		 6.5 (14.3) 9.1 (20) 17.7 (39)
CF-F
Weight water cooled kg(lb) ISO-K 3.4 (7.5)
4.4 (9.7)		 3.4 (7.7)
4.4 (10.3)		 6.5 (14.3) 9.2 (20.2) 17.2 (37.9)
CF-F
Controller 　 ACT 200T
CFV100 OEM		 ACT 200T
CFV100 OEM		 ACT 600T
ACT 250		 ACT 600T
ACT 250		 ACT 1000T
Controller weight

kg(lb)

 mkj 2.6 (5.7) 4 (8.8) 4 (8.8) 8.5 (18.7)
Controller size 　 1/4 Rack 1/4 Rack 1/2 Rack 1/2 Rack 1/2 Rack
Power supply 　 100 to 240 V-50/60 Hz-Single phase
Maximum power consumption VA 100 100 300 300 800
(1)Measured to Pneurop standards with an exhaust pressure below 10-2 mbar
(2)Water cooled model with CF-F inlet flange

ATP "C" applications

Corrosive gas processes in:

．Industry
．Research and development
．Analytical instruments.

  
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旭豪真空科技有限公司
SHANG HAUR VACUUM TECHNOLOGY CO., LTD.
公司地址：台灣 新北巿土城區大安路142號
NO.142,DAH AN Road, Tu Cheng City,TAIPEI HSIEN, TAIWAN 

連絡人：徐建榮 經理 
TEL：886-2-8076-3000 FAX：886-2-8076-3300
E-MAIL：sh.vacuum@msa.hinet.net
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