Ion Pumps

VacIon Plus is a complete family of ion pumps, controllers, options, and accessories, designed to provide solutions to every application.

Parameters such as operating pressure, the mixture of gases to be pumped, and the maximum starting pressure can vary so dramatically that no one ion pump would be the best in every case. That is why Varian offers such a complete range of ion pump types and sizes, so that the best performance can be selected for each application.

The VacIon Plus family includes Diode, Noble Diode, and StarCell𦲷 pump versions. It also includes MiniVac, Dual, and MidiVac Ion Pump controllers, to provide a selection of power levels and interfaces.

Features
Optimized element cells
Shipped while under vacuum
Wide range of pumping speeds
Many pump body configurations
Interlocking feedthrough connections
Three kinds of pumping elements
Ceramic insulators for long pump life