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Microvane® and Windsor™
Rotary Vane Pumps

STOKES 
 VACUUM
INC.

Microvane ® Pumps
Microvane pumps incorporate a combination of features that makes them highly resistant to chemical attack, mechanical wear, and abrasion. They are useful for a broad range of applications, including certain phases of semiconductor processing and for optical coating systems, metallurgical processes, and others. Pumps are available for oxygen-rich applications.

Standard Microvane and Windsor Features

Two-stage design       Viton shaft seals
Anti-suckback valve Internal oil system
Gas ballast Standard ISO flanges

Windosor TM Small Vane Pumps
The Windosor line of compact, rugged, highly effcient directdrive pumps are ideal for R&D, laboratory, light manufacturing, and many OEM applications, such as semiconductor processing, electron microscopes, and for backing turbo-molecular pumps.


Specifications   Windosor Models

Microvane Models

  Model 15 Model 31 Model 56 Model 74 Model 110 Model V-013-2 Model V-017-2 Model V-023-2
Nominal pump    displacement
  cfm (liters/min)-60 Hz
  cfm (liters/min)-50 Hz
Ultimate vacuum level
  torr
  mbar
1.5 (43)
1.25 (36)

3.0 × 10-3
4.0 × 10-3
3.1 (88)
2.6 (73)

3.0 × 10-3
4.0 × 10-3
5.6 (160)
4.7 (133)

6.0 × 10-4
8.0 × 10-4
7.4 (210)
6.2 (175)

6.0 × 10-4
8.0 × 10-4
11.0 (312)
9.2 (260)

4.0 × 10-4
5.3 × 10-4
20 (566)
16.7 (473)

5.0 × 10-4
6.6 × 10-4
36.7 (1038)
30.6 (866)

5.0 × 10-4
6.6 × 10-4
55 (1558)
46 (1303)

5.0 × 10-4
6.6 × 10-4
Oil capacity qt (l) 0.48 (.45) 0.48 (.45) 1.4 (1.3) 1.4 (1.3) 1.25 (1.2) 2.8 (2.6) 4.4 (4.2) 4.4 (4.2)
Motor hp, TEFC motor
  60 Hz, rpm
  50 Hz, rpm
1/6
3450
2875
1/4
3450
2875
1/2
1725
1438
1/2
1725
1438
3/4
1725
1438
1-1/2
1800
1500
2
1200
1000
3
1800
1500
Inlet and outlet connections KF16 KF16 KF25 KF25 KF25 KF40 KF40 KF40
Pump weight lb (kg) 24.5 (11.1) 24.5 (11.1) 58.5 (26.6) 58.5 (26.6) 69.0 (31.3) 135 (62) 234 (106) 226 (103)
Overall L × W × H in.
dimensions   mm
14.5 × 5.1 × 8.4
368 × 130 × 213
20.5 × 7.1 × 10.7
528 × 179 × 272
21.2 × 7.1 × 10.7
538 × 179 × 272
26.62 × 8.12 × 16.62
676 × 206 × 422
32.68 × 9.75 × 18.12
830 × 248 × 460
31.37 × 9.75 × 18.12
797 × 248 × 460

旭豪真空科技有限公司
SHANG HAUR INDUSTRIAL CO., LTD.
台北縣土城市大安路142號
NO.142,DAH AN Road, Tu Cheng City,
TAIPEI HSIEN, TAIWAN, R.O.C.
TEL:02-8076-3000 FAX:02-8076-3300

E-MAIL:sh.vacuum@msa.hinet.net