◆歐.美.日.韓名廠真空泵浦.渦輪泵浦.鼓風機.真空錶等,總代理◆
Turbo Pumps

Features & Benefits

Broad product offering, from 70 to 6,000 l/s
• Covers all possible applications and market segments

State-of-the-art MacroTorr Technology
• Maximizes the throughput.
• Extends the foreline pressure tolerance up to 18 bar.
• Increases the compression ration by decades.

Monolithic rotors
• Each rotor is machined from a single piece of aluminum alloy.
• Weight is minimized.
• Pumps may be operated in any position without compromise.
• Stresses on materials and bearings are reduced.

Highly reliable, maintenance-free ceramic ball bearings
• No oil, no contamination.
• Increased MTTF.

Built-in controllers available for Navigator pumps
• Simple, space-saving configuration
• Navigator software eases remote control and monitoring.

Turbo-V 81M
Turbo-V 81 T
Turbo-V 301 Navigator
Turbo-V 551 Navigator
Turbo-V 701 Navigator
Turbo-V 1001 Navigator
Turbo-V 3K-T System
Turbo-V 2K-G System
Pump Specification
DN 40
DN 63
DN 40
DN 63
DN 100
DN 160
DN 100
DN 160
DN 200
DN 160
DN 200
DN 250
DN 250
DN 250
pumping Speed, l/s
Nitrogen
50
77
50
77
250
280
350
550
690
790
950
1,050
2.050
1.600
Helium
56
65
56
65
220
230
450
600
620
820
870
900
2,400
Hydrogen
46
50
46
50
200
210
450
510
510
860
900
920
2,300
Compression Ratio
Nitrogen
5x
5x
7x
7x
7x
7x
>1x
>1x
1x
1x
1x
1x
1x
3x
Helium
8x
8x
3x
3x
1x
1x
1x
1x
1x
1x
1x
1x
1.2x
Hydrogen
7x
7x
3x
3x
1x
1x
1x
1x
1x
1x
1x
1x
1.5x
Base Pressure, mbar
with recommend mechanical pump
5x
5x
5x
5x
<5x
<5x
<1x
<1x
<1x
<1x
<1x
<1x
<1x
<1x
with recommended dry pump
5x
5x
5x
5x
<5x
<5x
<1x
<1x
<1x
<1x
<1x
<1x
<1x
<1x
Startup Time, min
<1
<1
<1
<1
2.5
2.5
<5
<5
<5
<4
<4
<4
<9
<7
Rotational Speed,rpm
80,000
80,000
80,000
80,000
56,000
56,000
42,000
42,000
42,000
38,000
38,000
38,000
31,800
33,000
Recommended Forepump
Two-stage mechanical pump
DS 42-DS 102
DS 42-DS 102
DS 42-DS 102
DS 42-DS 102
DS 102
DS 102
DS 302
DS 302
DS 402
DS 402
DS 402
DS 402
> 50 /h
> 40 /h
Dry pump
SH-110
SH-110
SH-110
SH-110
SH-110
SH-110
TS-300
TS-300
TS-300
TS-300
TS-300
TS-300
Inlet Flange, nominal diameter
Klamp Flage,mm
40
-
40
-
-
-
-
-
-
-
-
-
-
-
ConFlatR, mm (inches OD)
35(2.75)
63(4.5)
35(2.75)
63(4.5)
100(6)
160(8)
100(6)
160(8)
200(10)
-
200(10)
-
250(12)
-
ISO clamp style, mm
-
63
-
63
100
160
-
160
200
160
200
250
-
-
ISO-F bolted, mm
-
-
-
-
-
-
-
160-F bolted
200 F bolted
-
200-F bolted
250-F bolted
250-F bolted
250-F bolted
Foreline Flange, nominal diameter
Klamp Flange
NW16
NW16
NW16
NW16
NW16
NW16
NW25
NW25
NW25
NW40
NW40
NW40
NW40
NW40
SEM Version Available on Request
-
-
-
-
-
-
Controllers
Rack Controller
-
-
Navigator on board Controller
-
-
Integrated Electronics
-
-
-
-
-
-
-
-
-
-
-
-
PCB Controller
-
-
-
-
-
-
-
-

 

旭豪真空科技有限公司
SHANG HAUR INDUSTRIAL CO., LTD.
台北縣土城市大安路142號
NO.142,DAH AN Road, Tu Cheng City,
TAIPEI HSIEN, TAIWAN, R.O.C.
TEL:02-8076-3000 FAX:02-8076-3300

E-MAIL:sh.vacuum@msa.hinet.net