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Ion Pumps

VacIon Plus is a complete family of ion pumps, controllers, options, and accessories, designed to provide solutions to every application.

Parameters such as operating pressure, the mixture of gases to be pumped, and the maximum starting pressure can vary so dramatically that no one ion pump would be the best in every case. That is why Varian offers such a complete range of ion pump types and sizes, so that the best performance can be selected for each application.

The VacIon Plus family includes Diode, Noble Diode, and StarCell pump versions. It also includes MiniVac, Dual, and MidiVac Ion Pump controllers, to provide a selection of power levels and interfaces.

Features

  • Optimized element cells
  • Shipped while under vacuum
  • Wide range of pumping speeds
  • Many pump body configurations
  • Interlocking feedthrough connections
  • Three kinds of pumping elements
  • Ceramic insulators for long pump life
Miniature Pump
2 Lt/sec Pump
8 Lt/sec Pump
Vaclon Plus 20
Vaclon Plus 40
Vaclon Plus 55
Vaclon Plus 75
Vaclon Plus 150
Vaclon Plus 300
Vaclon Plus 500
Inlet Flange
2 3?4” OD CFF (NW 35)
2 3?4” OD CFF (NW 35)
4 1?2” OD CFF (NW 63)
6" OD CFF (NW 100)
6" OD CFF (NW 100)
8" OD CFF (NW 150)
8" OD CFF (NW 150)
Element Type
StarCellR
Noble Diode
Diode
StarCellR
Noble Diode
Diode
StarCellR
Noble Diode
Diode
StarCellR
Noble Diode
Diode
StarCellR
Noble Diode
Diode
StarCellR
Noble Diode
Diode
StarCellR
Noble Diode
Diode
Pumping Speed (L/S)
(Saturated Pump at mbar)
Nitrogen
0.2
2
8
20
22
27
34
36
40
50
53
55
65
68
75
125
135
150
240
260
300
410
440
500
Operating Life (Hours) (at mbar)
N/A
8,000
40,000
80,000
50,000
50,000
80,000
50,000
50,000
80,000
50,000
50,000
80,000
50,000
50,000
80,000
50,000
50,000
80,000
50,000
50,000
80,000
50,000
50,000
Maximum Starting Pressure (mbar)
1 x (with
MicroVac control unit)
1 x (with
MicroVac control unit)
?1 x
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Maximum Baking Temperature (°C)
400 (without magnet)
150 (with magnet)
400 (without magnet)
150 (with magnet)
350
350
350
350
350
350
350
350
350
350
350
350
350
350
350
350
350
350
350
350
350
350
Weight kg (Ibs)
Net 0.3 (0.66)
Shipping 0.6 (1.33)
Net 0.3 (0.66)
Shipping 0.6 (1.33)
Without magnet
4 (9)
Net 7 (15)
Shipping 11 (24)
Net 17 (37)
Shipping 21 (46)
Net 18 (39)
Shipping 22 (48)
Net 19 (42)
Shipping 23 (51)
Net 43 (94)
Shipping 53 (110)
Net 69 (149)
Shipping 84 (185)
Net 120 (264)
Shipping 135 (297)
SEM Version Available on Request
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Controllers
Dual
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MiniVac
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MidiVac
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MicroVac
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旭豪真空科技有限公司
SHANG HAUR INDUSTRIAL CO., LTD.
台北縣土城市大安路142號
NO.142,DAH AN Road, Tu Cheng City,
TAIPEI HSIEN, TAIWAN, R.O.C.
TEL:02-8076-3000 FAX:02-8076-3300

E-MAIL:sh.vacuum@msa.hinet.net