2
STAGE E2M High
VACUUM
PUMPS
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E2M0.7
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E2M1.5
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E2M18
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E2M30
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E2M40
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E2M80
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E2M175
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E2M275
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Displacement l/min
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18.3
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36.6
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416
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648
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840
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941
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3566
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5833
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Ultimate Vacuum Torr
W/O gas ballast
W full gas ballast
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5.3X10-4
1.5X10-1
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1.1X10-3
1.9X10-2
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7.5X10-4
1.1X10-2
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7.5X10-4
1.1X10-2
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7.5X10-5
3.8X10-3
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7.5X10-5
3.8X10-3
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7.5X10-5
3.8X10-3
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7.5X10-5
3.8X10-3
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Motor power kw
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0.09
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0.16
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0.75
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0.9
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1.5
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3
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6.5
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8.5
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0:1 capacity l
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0.28
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0.28
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1.05
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1.5
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4.07
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6.3
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25
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18
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Noise level dB(A)
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43
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54
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—
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—
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—
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—
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—
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—
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旭豪真空科技有限公司
SHANG HAUR INDUSTRIAL CO., LTD.
台北縣土城市大安路142號
NO.142,DAH AN Road, Tu Cheng City,
TAIPEI HSIEN, TAIWAN, R.O.C.
TEL:02-8076-3000 FAX:02-8076-3300
E-MAIL:sh.vacuum@msa.hinet.net
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